Cleanroom Robots for Semiconductor Manufacturing


  Date: Tuesday, March 11, 2014, 6:30 PM
  Location: Cadence / Bldg 10, 2655 Seely Ave, San Jose, CA (map)
  Speaker: Dr. Karl Mathia, President, Zidecs Automation

Time: 6:30 PM (PT) Networking/Refreshments, 7:00 PM Presentation

Co-sponsored with IEEE Santa Clara Valley Robotics & Automation Society
and IEEE Santa Clara Valley Control Systems Society

Registration: Please register by ordering a ticket below

Abstract

The talk emphasizes the technical challenges with the automation of ultra-clean semiconductor factories, and discusses cleanroom robotics as an example. Topics include cleanliness requirements, design guidelines for cleanroom robots, kinematics and dynamics, as well as the installation and test of cleanroom robotic systems. Beginning with early substrate-handling robots, the speaker outlines how current cleanroom automation evolved over time to accommodate – and enabled – the transition to 200 mm and 300 mm wafer sizes. Real-world examples illustrate the design of robots for atmospheric and vacuum environments.

Speaker Bio

Dr. Karl Mathia is an experienced engineer in the areas of motion control, robotics, and cleanroom automation. He is the owner and president of Zidecs Automation, Inc., a technology firm that provides engineering services and automation solutions to equipment makers. Karl previously worked for automation providers, including Brooks Automation and Newport Corporation. He holds an M.S. in Electrical Engineering from the Technical University in Munich, Germany, and a Ph.D. in Electrical and Computer Engineering from Portland State University in Oregon. He authored of over 30 technical articles and the book “Robotics for Electronics Manufacturing – Principles and Applications in Cleanroom Automation”, published by Cambridge University Press in 2010. Karl is a Senior Member of the IEEE and Chair of the Control Systems Society in Silicon Valley.

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